The companies will focus on metrology, the measurement and analysis of the physics and components used in the development of small-scale processors.
"By combining individual research strengths and intellectual property we reduce the significant costs associated with advancing the next generation of chip technology," said Bernie Meyerson, chief technology officer at IBM's Systems & Technology group.
Eiji Takeda, vice president, executive officer and general manager of Hitachi's R&D group, added: "Our two companies have a long history of successful business collaboration and we look forward to extending this to include the semiconductor metrology research arena."
Researchers from the two companies will work at IBM's campuses in Yorktown Heights and Albany, New York.
IBM hopes to have its first 32nm chips by 2010. Intel has its first 32nm chips slated for 2009.
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