Intel has paid $15 million for a 4.7 per cent share of a California based firm that makes tools to help the chip giant develop smaller processors.
Silicon Valley Group (SVG) and Intel will also collaborate on SVG's future 157 nanometre lithography technology which is used to imprint circuits on silicon wafers.
Lithography tools using SVG's 157 nanometre technology will allow Intel to extend its use of optical lithography in future generations of processors. Early tools are expected to be available in 2002 to print circuits for the 0.10 micron range and beyond.
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